MOCVD 在线监测系统系列产品
MOCVD 在线监测系列产品 in-Situ Monitoring Series
l viperRTC – Wafer reflectivity, temperature, curvature in-situ monitoring
l viper405 - Wafer surface temperature measurement
l Calibration unit - Broad band or single wavelength temperature calibration tool
l Scanpyro - Susceptor/Wafer profile measurement
温度反射率翘曲度在线监测 viperRTC
Wavelength
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940nm, 405nm, 633nm or customized
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Light Source
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Temperature stabilized LED
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Temperature Range
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500 to 1450 °C or customized
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Accuracy
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<±1°C (by black body calibration)
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Repeatability
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< 1°C
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Curvature
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-350 km-1 ~ +350 km-1
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Software functions
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l growth rate calculation
-composition analysis
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* Almost 100% market share in made in China MOCVD system, more than 400 system installed.
表面温度测量 viper405
l Temperature range: 650-1300 °C
l Spectral wavelength: 405nm
l Detector: Photon Counter
l Resolution: 0.1°C
l Emissivity setting: 0.100-1.0
l Repeatability: <1 °C
l Integration time: >= 1ms
l Interface: RS232C/Ethernet
l Power supply: 12V/1A
l TUV/CE Certification
l Optional Reflectivity and/or Curvature integration
温度校准单元 Calibration Unit
l Spectral wavelength: 940nm
l Data acquisition rate: 10.24 kHz
l Aperture size: 4mm
l Temperature Range: 500-1200°C
l Noise: < 0.005°C
l Temperature drift: < 0.2°C
l Repeatability: < 0.1°C
温场扫描系统 Scanpyro
l Scanning shows the temperature of the entire susceptor and wafers
l Adjustable display color settings
l Display radial and per circle distributions
l Click any point to display the temperature value
